
The WXS-800 wafer inspection microscope is optimized for reliable, high-quality inspection of 8” (200mm) silicon wafers and semiconductors. Circuit boards, flat panel displays and other large samples can also be observed with the WXS-800, providing flexibility across sample type and inspection application. The microscope comes standard with reflected light brightfield, darkfield, and simple polarization with the option to add DIC. The tilting ergonomic trinocular viewing head and 10x eyepieces that provide a large 25mm field of view. The coded 6 position nosepiece comes with Plan semi-Apochtromatic 5x, 10x, 20x, and 50x objectives, with an optional 100x objedtive. The large stage accommodates 8" wafers and flat panel displays and has a mechanical XY movement as well as mechanical clutch movement.
| Specifications | |
|---|---|
| Head: | Ergonomic trinocular viewing head with erect image 0-30° binocular tube tilting 100/0 : 0/100 light path selector Interpupillary distance adjustment 47-78mm |
| Eyepieces: | SW10X-H25mm, focusing |
| Nosepiece: | Encoded sextuple nosepiece for brightfield and darkfield objectives, DIC slot |
| Objectives: | Plan semi-Apochromatic 5x (NA 0.15), 10x (NA 0.3), 20x (NA 0.4), 50x (NA 0.8), Brightfield/Darkfield objectives Optional 100x (NA 0.9) |
| Stage: | Double layer mechanical stage; 14” x 12” platform; 210mm x 210mm movement range; sample holder for 8” wafers; XY stage stalk; mechanical clutch for course stage positioning |
| Illumination: | Reflected light illuminator, NA 0.65 condenser with centerable aperture diaphragm and field diaphragm (Köhler alignment); 3-position turret (Brightfield, Brightfield+ND6, Darkfield positions); 5W LED with variable intensity adjustment and Light Intensity Memory (LIM) function; two filter slots |
| Contrast Methods: | Brightfield, Darkfield, Simple Polarization, Differential Interference Contrast (optional); blue, green, yellow and frosted filter sliders included |
| Focusing: | Low position coaxial coarse/fine focus; focus travel limit; 33mm focusing range; 1μm fine focus indication |
| Accessories: | Simple polarizer/analyzer 360° rotating; blue, green and frosted filters |
| Warranty: | 5 year limited warranty for parts and labor; 1 year warranty on electronic components and LED bulb |
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